A new method enables 2D-material semiconductor transistors to be directly integrated onto a fully fabricated 8-inch silicon wafer, which could enable a new generation of transistor technology, denser device integration, new circuit architectures, and more powerful chips.
Emerging AI applications, like chatbots that generate natural human language, demand denser, more powerful computer chips. But semiconductor chips are traditionally made with bulk materials, which are boxy 3D structures, so stacking multiple layers of transistors to create denser integrations is very difficult. However, semiconductor transistors made from ultrathin 2D materials, each only about three atoms in thickness, could be stacked up to create more powerful chips. To this end, MIT researchers have now demonstrated a novel technology that can effectively and efficiently "grow" layers of 2D transition metal dichalcogenide (TMD) materials directly on top of a fully fabricated silicon chip to enable denser integrations. Growing 2D materials directly onto a silicon CMOS wafer has posed a major challenge because the process usually requires temperatures of about 600 degrees Celsius, while silicon transistors and circuits could break down when heated above 400 degrees. Now, the interdisciplinary team of MIT researchers has developed a low-temperature growth process that does not damage the chip. The technology allows 2D semiconductor transistors to be directly integrated on top of standard silicon circuits. In the past, researchers have grown 2D materials elsewhere and then transferred them onto a chip or a wafer. This often causes imperfections that hamper the performance of the final devices and circuits. Also, transferring the material smoothly becomes extremely difficult at wafer-scale. By contrast, this new process grows a smooth, highly uniform layer across an entire 8-inch wafer. The new technology is also able to significantly reduce the time it takes to grow these materials. While previous approaches required more than a day to grow a single layer of 2D materials, the new approach can grow a uniform layer of TMD material in less than an hour over entire 8-inch wafers. Due to its rapid speed and high uniformity, the new technology enabled the…