Plasma Etching

Buried features and re-entrant geometries drive application-specific metrology solutions.

Physicists have now observed electron whirlpools. Theorists have long predicted electrons should exhibit this hallmark of fluid flow; the findings could inform the design of more efficient electronics.

Manufacturing 3D structures will require atomic-level control of what's removed and what stays on a wafer.

Tech makes millions of connections in a square millimeter of silicon

The past few years have seen a massive surge in the amount of data transferred and processed per second. Rapidly emerging technologies, such as high-dimensional quantum communications, large-scale neural networks, and high-capacity networks, require large bandwidths and high data transfer speeds. One plausible way to achieve them is by replacing the conventional metallic wires between the components in an…

Since the scientists at Bell Labs invented the world's first transistor in December 1947, a revolution in microelectronics technology has profoundly affected lifestyles worldwide. As electronics get smaller and smaller, it is a challenge to find an easy, fast, and low-cost way to fabricate micro-nano components. Traditional direct writing fabrication methods such as mechanical scribing, focused ion beam etching,…

In a high-NA exposure stack, the resist is just the beginning.

Thanks to an accidental discovery, researchers at the University of British Columbia have created a new super-black material that absorbs almost all light, opening potential applications in fine jewelry, solar cells and precision optical devices.

A new study suggests rough surfaces inspired by the bacteria-killing spikes on insect wings may be more effective at combating drug-resistant superbugs, including fungus, than previously understood.

Silicon (Si) photonics has recently emerged as a key enabling technology in many application fields thanks to the mature Si process technology, the large silicon wafer size, and Si optical properties. However, the inability of Si-based materials to efficiently emit light requires the use of other semiconductors for light sources.

Today, astronomers seek to observe the faintest and most distant objects possible. Extremely Large Telescopes (ELTs), with apertures in the order of several dozen meters, are the next generation facilities to do so. However, building larger telescopes is only one part of the equation. The other part is the capability of detecting the gathered photons in the most efficient way possible.